So you require a vacuum table that transmits UV light. Yah, we can do that. The top and bottom table surfaces are made from fused silica quartz. The material transmits 93 % of UV light in the 300 nanometer range.
Slots between precision lapped fused silica bars allow vacuum flow to pass. The lower plate is easily removable for cleaning the internal surfaces. The UV light source is mounted under the lower plate of the table. Oh, and we make the UV power supply and irradiator too. Right here in Connecticut USA.